吉林大学学报(工学版)

• • 上一篇    下一篇

铝掺杂氧化锌薄膜的电学及光学性能

刘耀东1,2, 李光玉1, 连建设1   

  1. 1.吉林大学 汽车材料教育部重点实验室, 长春 130022; 2.长春工业大学 材料科学与工程学院,长春 130012)
  • 收稿日期:2006-06-12 修回日期:2006-10-12 出版日期:2007-05-01 发布日期:2007-05-01
  • 通讯作者: 连建设

Effect of Al-doping on electrical and optical properties of ZnO films

Liu Yao-dong1,2, Li Guang-yu1, Lian Jian-she1   

  1. 1.The Key Lab of Automobile Materials, Ministry of Education,Jilin University,Changchun 130022,China; 2.School of Materials Science and Engineering ,Changchun University of Technology,Changchun 130012,China
  • Received:2006-06-12 Revised:2006-10-12 Online:2007-05-01 Published:2007-05-01
  • Contact: Lian Jian-she

摘要:

利用脉冲激光沉积法,在氧气氛下(氧分压为11 Pa)以石英玻璃为基体沉积了铝掺杂氧化锌薄膜。靶材选用锌铝合金靶,沉积过程中基体温度保持在150 ℃。研究了ZnO薄膜中铝的质量分数与薄膜电学性能和发光性能的关系。结果表明,掺杂铝的质量分数为1.37%时所获得的ZnO薄膜具有最小的电阻率和较强的紫外发光特性。
关键词:中图分类号:
Key words:

关键词: 材料实验, 铝掺杂氧化锌薄膜, 紫外发光, 电学性能, 脉冲激光沉积

Abstract: Aluminumdoped zinc oxide (AZO) thin films have been deposited on quartz glass substrates by pulsed laser deposition from ablating metallic targets in oxygen atmosphere (11 Pa of oxygen pressure) and under a substrate temperature of 150 ℃. The structural, electrical and optical properties of these films were investigated as a function of Aldoping content in the film. It was observed that 1.37% of Al content in the film is the optimum doping content that makes the film to achieve the minimum film resisitivity and strong ultraviolet emission.

Key words: materials experiment, aluminumdoped zinc oxide thin films, ultraviolet emission, electrical property, pulsed laser deposition

中图分类号: 

  • TG115.26
[1] 赵高磊,张海龙,张波萍. 铜颗粒分散铌酸钾钠压电复合材料的制备与性能[J]. 吉林大学学报(工学版), 2011, 41(05): 1300-1304.
[2] 杨晓红,张奎,张美娟,罗克帅,刘勇兵 . Mg-Y4-Nd3合金的组织与摩擦磨损性能[J]. 吉林大学学报(工学版), 2008, 38(04): 835-839.
Viewed
Full text


Abstract

Cited

  Shared   
  Discussed   
No Suggested Reading articles found!