关键词: 地质学, 精细测量, 曲线拟合, 电子探针背景

Abstract: Due to the existence of interference and nonlinear background in X-ray spectrum, there are errors in the results of quantitative analysis on electron probe, especially for the lower element content. In order to measure and deduct the X-ray background intensity exactly, the background measurement and deduction method was investigated and corresponding software of control and measurement was designed. It was combined with several methods, including determining the interference through the characteristic X-ray spectral database of the measured element, scanning the spectrum accurately by adding measurement points, simulating spectrum by linear and polynomial fitting. It was approved by standard samples, III-HN852 and I-E0781. Compared with the regular method, the interference was reduced and the accuracy of quantitative analysis was improved.

Key words: geography, accurate measurement, curve fitting, electron probe background