吉林大学学报(工学版) ›› 2010, Vol. 40 ›› Issue (增刊): 252-0256.

• 论文 • 上一篇    下一篇

纳米氧化铜膜的制备及其光学特性

詹迪铌1,张会平2,张桂兰3,张宏壮3,刘先黎3   

  1. 1.吉林大学 通信工程学院,长春 130022;2.北汽福田汽车股份有限公司 工程研究院,北京102206;3.吉林大学 生物与农业工程学院,长春 130022
  • 收稿日期:2010-04-28 出版日期:2010-09-01 发布日期:2010-09-01
  • 通讯作者: 刘先黎(1965-),男,副教授,博士.研究方向:纳米材料及工程仿生.E-mail:lxl5211@126.com E-mail:lxl5211@126.com
  • 作者简介:詹迪铌(1974-),女,讲师.研究方向:电子元器件新材料.E-mail:zhandn1974@126.com
  • 基金资助:

    中国博士后科学基金面上项目(20080430159)

Fabrication and optical property of nanosized cupric oxide films

ZHAN Di-ni1,ZHANG Hui-ping2, ZHANG Gui-lan3, ZHANG Hong-zhuang3, LIU Xian-li3   

  1. 1.College of Communication Engineering, Jinlin University, Changchun 130022,China;2.Automotive Engineering Product Research &|Development Institute, Beiqi Foton motor Co., Ltd., Beijing 102206,China;3.College of Biology and Agriculture Engineering, Jilin University, Changchun 130022,China
  • Received:2010-04-28 Online:2010-09-01 Published:2010-09-01

摘要:

利用改进的化学镀铜技术制备了纳米铜膜,并采用热氧化技术对纳米铜膜直接氧化处理,在未经刻蚀的玻璃表面制备了纳米氧化铜膜。采用XRD、FTIR和XPS技术研究了铜膜氧化过程及晶体结构,计算了晶粒尺度。使用FESEM对不同厚度的氧化铜膜表面进行了观察。结果表明:在350 ℃加热1 h条件下,纳米铜膜可直接被氧化成纳米氧化铜膜;获得的氧化铜膜具有纳纳结构(即双重纳米结构)。氧化铜膜厚由54 nm增加到113 nm时,相应的平均晶粒尺度从12 nm增加到23 nm,团簇体尺寸从30~50 nm增加到60~100 nm,透光率从74.7%降到65.17%,禁带宽度范围为2.83~2.94 eV。

关键词: 化学镀, 热氧化, 纳米氧化铜膜, 透光率, 禁带宽度

Abstract:

Thin nanocrystalline Cu films are deposited on a glass substrate using an improved electroless plating technique and Cu films oxidized using heat oxidation technology, Nanocrystalline Cupric Oxide (CuO) films were fabricated on unetched glass substrate. The process of Cu films oxidized and crystalline structure and grains size were investigated by XRD、FTIR and XPS. The surface morphologies of CuO films with different thickness were characterized by FESEM. Experimental results show that nanocrystalline Cu films were directly oxidized to form nanocrystalline CuO films which have nanonano structure at 350 ℃ for 1 h. With the thickness of CuO films increasing from 54 nm to 113 nm, the average grains size increases from 12 nm to 23 nm, and the agglomerates size increases from 30~50 nm to 60~100 nm, and the optical transmittance ratio decreases from 74.7% to 65.17%, and the range of band gaps is from 2.83 eV to 2.94 eV.

Key words: electroless plating, heat oxidation, nanocrystalline cupric oxide films, optical transmittance ratio, band gap

中图分类号: 

  • TB383.1
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