应用静电力矩改善新型转子式陀螺的动态特性

doi:10.13229/j.cnki.jdxbgxb201703022

吉林大学学报(工学版) ›› 2017, Vol. 47 ›› Issue (3): 850-854.doi: 10.13229/j.cnki.jdxbgxb201703022

应用静电力矩改善新型转子式陀螺的动态特性

刘晓为^{1, 2}, 李海¹, 翁睿¹, 张海峰¹, 赵军³

1.哈尔滨工业大学 MEMS中心,哈尔滨 150001;
2.哈尔滨工业大学微系统与微结构制造教育部重点实验室,哈尔滨 150001;
3.清华大学精密仪器系,北京 100084

收稿日期:2015-12-30 出版日期:2017-05-20 发布日期:2017-05-20
作者简介:刘晓为(1955-),男,教授,博士生导师.研究方向:MEMS,传感器,集成电路.E-mail:lxw@hit.edu.cn
基金资助:
“973”国家重点基础研究发展计划项目(2012CB934104); 国家自然科学基金项目(61071037)

Application of electrostatic torque to improve dynamic characteristics of novel rotational gyroscope

LIU Xiao-wei^{1, 2}, LI Hai¹, WENG Rui¹, ZHANG Hai-feng¹, ZHAO Jun³

1.MEMS Center, Harbin Institute of Technology, Harbin 150001,China;
2.Key Laboratory of Micro-Systems and Micro-Structures Manufacturing (HIT), Ministry of Education,Harbin Institute of Technology, Harbin 150001, China;
3.Department of Precision Instrument, Tsinghua University, Beijing 100084, China

Received:2015-12-30 Online:2017-05-20 Published:2017-05-20

摘要/Abstract

摘要： 提出应用静电力矩反馈的方法解决一种新型转子式陀螺的欠阻尼问题。设计了静电力矩反馈的机械结构,并对其进行了建模分析以及有限元仿真验证。通过对比不同反馈条件下陀螺的动态响应发现,该方法可以显著改善陀螺的动态特性。随着反馈电压的增加,陀螺系统从欠阻尼状态无限趋近临界阻尼状态。考虑到介质击穿的限制以及反馈强度对幅频特性的影响,最终确定反馈电压应设置在100 V附近。此时,系统单位阶跃响应的过冲由开环时的87%以上降低到约5%,稳定时间由1.3 s缩短为0.1 s左右。

关键词: 仪器仪表技术, 动态特性, 静电力矩, 转子式陀螺, 阶跃响应

Abstract: An electrostatic torque feedback approach is used to solve the underdamping problem of a novel rotational gyro. The electrostatic torque feedback structure is designed, modeled and validated by finite element analysis. By comparing the dynamic responses of the gyro to different feedback conditions, the approach is demonstrated to be able to significantly improve the dynamic characteristics of the gyro. As feedback voltage increases, the system can infinitely approach the critically damped state from the underdamped state. Due to the restriction of dielectric breakdown and the side effect of the feedback strength on the magnitude-frequency response, the feedback voltage should be about 100 V, where, the overshooting of the unit step is reduced from 87% to about 5% and the settling time is reduced from 1.3 s to about 0.1 s compared with the open-loop system.

Key words: technology of instrument and meter, dynamic characteristics, electrostatic torque, rotational gyroscope, step response

中图分类号:

TH703

刘晓为, 李海, 翁睿, 张海峰, 赵军. 应用静电力矩改善新型转子式陀螺的动态特性[J]. 吉林大学学报(工学版), 2017, 47(3): 850-854.

LIU Xiao-wei, LI Hai, WENG Rui, ZHANG Hai-feng, ZHAO Jun. Application of electrostatic torque to improve dynamic characteristics of novel rotational gyroscope[J]. 吉林大学学报(工学版), 2017, 47(3): 850-854.

参考文献

[1] Liu K, Zhang W, Liu W, et al. An innovative micro-diamagnetic levitation system with coils applied in micro-gyroscope[J]. Microsystem Technologies,2010,16(3):431-439.
[2] Purushotham A, Garverick S L, Edwards C, et al. A closed-loop micromotor control system[C]∥1996 IEEE International Symposium on Circuits and Systems,Atlanta, USA,1996:209-212.
[3] Li H, Liu X, Wang B, et al. Impact of assembly on signal detection from thin-wall rotors of micro-gyroscopes[J]. Aip Advances,2014,4(3):031341.
[4] Rahman A G A, Chao O Z, Ismail Z. Effectiveness of impact-synchronous time averaging in determination of dynamic characteristics of a rotor dynamic system[J]. Measurement,2011,44(1):34-45.
[5] Toler B F, Jr R A C, Mcbride J W. A review of micro-contact physics for microelectromechanical systems (MEMS) metal contact switches[J]. Journal of Micromechanics & Microengineering,2013,23(10):103001.
[6] Cui F, Chen W Y, Su Y F, et al. Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology[J]. MEMS/MOEMS Technologies and Applications II, 2004,5641:264-275.
[7] 宋彦,高慧斌,田彦涛,等. 伺服系统受摩擦扰动产生极限环的原因及稳定性分析[J].吉林大学学报:工学版,2011,41(1):214-220.
Song Yan, Gao Hui-bin,Tian Yan-tao, et al. Reasoning and stability of limit cycle generated by friction in servo system[J]. Journal of Jilin University (Engineering and Technology Edition),2011,41(1):214-220.
[8] Jeon J U, Higuchi T. Electrostatic suspension of dielectrics[J]. IEEE Transactions on Industrial Electronics,1998,45(6):938-946.
[9] Jung S, Choi J J, Lee C, et al. Optimally designed electrostatic microactuator for hard disk drives[C]∥IEEE International Conference on Robotics & Automation, Seoul, Korea,2001:1452-1456.
[10] Son H, Lee K M. Open-loop controller design and dynamic characteristics of a spherical wheel motor[J]. IEEE Transactions on Industrial Electronics,2010,57(10):3475-3482.

相关文章 15

[1]	仇艳凯, 李宝仁, 杨钢, 曹博, 刘真. 新型液压消声器吸收液压系统压力脉动的机理和特性[J]. 吉林大学学报(工学版), 2018, 48(4): 1085-1091.
[2]	王涛, 伞晓刚, 高世杰, 王惠先, 王晶, 倪迎雪. 光电跟踪转台垂直轴系动态特性[J]. 吉林大学学报(工学版), 2018, 48(4): 1099-1105.
[3]	李静, 丁明慧, 李立刚, 陈立军. 基于活塞形状的空气弹簧动特性分析与参数优化[J]. 吉林大学学报(工学版), 2018, 48(2): 355-363.
[4]	吴疆, 徐壮, 刘丽佳, 嵇艳鞠, 李肃义. 基于环绕式血氧探头的睡眠呼吸暂停综合征检测装置原型设计与开发[J]. 吉林大学学报(工学版), 2018, 48(2): 640-644.
[5]	杨诚, 宋萍, 彭文家, 金昊龙, 潘志强. 基于混合总线的装甲车辆实车综合测试系统设计[J]. 吉林大学学报(工学版), 2018, 48(1): 186-198.
[6]	杨诚, 宋萍, 彭文家, 邓高寿, 刘雄军. 装甲车辆综合测试系统上位机平台设计[J]. 吉林大学学报(工学版), 2017, 47(6): 1796-1803.
[7]	柏德恩, 全齐全, 李贺, 陈雅文, 邓宗全. 伺服加载的谐波减速器启动力矩测试系统[J]. 吉林大学学报(工学版), 2017, 47(6): 1804-1810.
[8]	杨越东, 陈吉清, 兰凤崇, 周云郊. 基于焊点参数识别的白车身动态特性[J]. 吉林大学学报(工学版), 2017, 47(5): 1379-1386.
[9]	王天皓, 王忠福, 王雨蒙, 杨开宇, 高印寒, 马喜来. 基于混沌多项式展开法的线束串扰统计模型[J]. 吉林大学学报(工学版), 2017, 47(5): 1568-1576.
[10]	陈赫, 杨智君, 吴昭春, 冯志刚, 赵科佳, 李抵非, 田地. 标准失真模拟分量视频信号源及其校准方法[J]. 吉林大学学报(工学版), 2017, 47(4): 1159-1164.
[11]	林君, 赵越, 蒋川东, 王应吉. 基于优化Block反演的地面磁共振测深新方法[J]. 吉林大学学报(工学版), 2017, 47(2): 530-539.
[12]	张飞, 单忠德, 任永新, 聂军刚, 刘丰. 缸盖缺陷检测系统线阵相机现场标定方法[J]. 吉林大学学报(工学版), 2017, 47(2): 540-545.
[13]	訚耀保, 原佳阳, 傅俊勇. 先导阀前腔串加阻尼孔的新型双级溢流阀特性[J]. 吉林大学学报(工学版), 2017, 47(1): 129-136.
[14]	何光, 张铭, 袁双石. 微机电系统后坐保险机构温度相关动态特性[J]. 吉林大学学报(工学版), 2017, 47(1): 145-150.
[15]	林君, 杨宇, 胡雪岩, 王世隆. 基于感性负载的瞬变电磁发射波形控制技术[J]. 吉林大学学报(工学版), 2016, 46(5): 1718-1724.

Metrics

Viewed

Full text

Abstract

Cited

Shared

Discussed

应用静电力矩改善新型转子式陀螺的动态特性

Application of electrostatic torque to improve dynamic characteristics of novel rotational gyroscope

RICH HTML

PDF (PC)

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 15

Metrics

本文评价

推荐阅读 0