吉林大学学报(工学版) ›› 2022, Vol. 52 ›› Issue (8): 1934-1942.doi: 10.13229/j.cnki.jdxbgxb20210149

• 通信与控制工程 • 上一篇    

偶极直流电渗场效应晶体管及其在微流控中的应用

李艳波(),张钰,刘维宇(),武奇生,王飚,姚博彬   

  1. 长安大学 电子与控制工程学院，西安 710064
  • 收稿日期:2021-02-24 出版日期:2022-08-01 发布日期:2022-08-12
  • 通讯作者: 刘维宇 E-mail:ybl@chd.edu.cn;liuweiyu@chd.edu.cn
  • 作者简介:李艳波（1980-），男，副教授，博士.研究方向：电子器件与电力电子技术. E-mail： ybl@chd.edu.cn
  • 基金资助:
    国家自然科学基金项目(11702035);陕西省重点研发计划项目(2021KW-13);河南省交通运输厅科技项目(2021G10);国家级大学生创新创业训练计划项目(202010710581)

Bipolar DC flow field⁃effect⁃transistor and its application in microfluidics

Yan-bo LI(),Yu ZHANG,Wei-yu LIU(),Qi-sheng WU,Biao WANG,Bo-bin YAO   

  1. School of Electronics and Control Engineering，Chang'an University，Xi'an 710064，China
  • Received:2021-02-24 Online:2022-08-01 Published:2022-08-12
  • Contact: Wei-yu LIU E-mail:ybl@chd.edu.cn;liuweiyu@chd.edu.cn

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摘要：

从电动力学的角度提出了一种新的偶极直流电渗场效应控制方法。在薄层近似和低压极限下建立数学模型，验证偶极直流流动场效应晶体管结构在微米尺度进行流体电动操纵的可行性。采用两组并排反极性栅电极对的集成器件设计，建立了一种用于全电动驱动分析物处理的微器件模型，通过使用较小的栅极电压便可获得液体混合物，从而在小Dukhin数下产生较少的不利影响。该项技术在现代微流控系统中开发全自动液相执行器等方面具有应用价值。

关键词: 微电子学与固体电子学, 偶极场效应直流电渗流动控制, 流动场效应晶体管, 诱导电荷电渗

Abstract:

A new method of bipolar field-effect control on DC electroosmosis（DCEO） is proposed from the perspective of electrodynamics. A mathematical model is established in thin-layer approximation and low-voltage limit to verify the feasibility of the bipolar DC-FFET structure for fluid electrodynamic manipulation at the micrometer scale. An integrated device design with two sets of side-by-side reverse polarity gate electrode pairs was used to construct a micro-device model for fully electrically driven analyte processing. By using a smaller gate voltage， an almost perfect liquid mixture can be obtained， resulting in less adverse effects at a small Dukhin number. This technology has great potential in the development of fully automatic liquid phase actuators in modern microfluidic systems.

Key words: microelectronics and solid-state electronics, bipolar DC field-effect flow control, flow field-effect-transistor, induced-charge electroosmosis

中图分类号: 

  • TN42

图1

偶极直流场效应电渗流动控制的微流控装置的二维示意图"

图2

栅极端子长度LG对双功能器件性能的影响"

图3

栅电压VG对器件性能的影响"

图4

源电压幅值VS对器件双功能效率的影响"

图5

相邻G端子间电极间距LGG对器件性能的影响"

图6

不同次数倒置的B-DCFFET器件中微流体的同时泵送与混合"

图7

栅电极终端个数（n）对集成化器件配置的影响"

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