吉林大学学报(工学版) ›› 2004, Vol. ›› Issue (3): 445-448.

Previous Articles     Next Articles

Measurement technique of In-plane motionfor MEMS based on block matching

JIN Cuiyun, LI Dachao, JIN Shijiu, WANG Likun, LI Yibo   

  1. State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China
  • Received:2004-02-19 Online:2004-07-01

PDF (PC)

469

Abstract: In order to measure motion characteristic and dynamic parameters of MEMS resonator in every moment based on the technique of stroboscopic imaging, clear motion images in one cycle were obtained. Using block matching technique to process motion images of MEMS resonator, the dynamic parameters were also obtained, which give important reference to MEMS designation. Experimental results indicate that the repetition of measurement is 40 nm.

Key words: automatic control technologyv, MEMS resonator, dynamic characteristic, stroboscopic imaging, block matching

CLC Number: 

  • TP274
[1] KREHL P, ENGEMANN S, REMBE C, HORFER E P. High-speed visualization, a powerful diagnostic tool for microactuators-retrospect and prospect［J］. Micriosystem Technologies, 1999(5):113-132.
[2] REMBE Christian, KANT Rishi, MULLER Richard S. Optical measurement methods to study dynamic behavior in MEMS［C］//Microsystems Engineering:Metrology and Inspection Proc SPIE Bellingham, USA, 2001.
[3] HEMMERT W, MERMELSTEIN M S, FREEMAN D M. Nanometer resolution of three-dimensional motions using video interference microscopy［C］//IEEE International MEMS99, Orlando FL, 1999.
[4] 李波,涂亚明.基于自适应搜索的快速运动估计算法［J］.北京航空航天大学学报,2001,27(4):373-376.LI 1Bo, TU Yaming. A fast motion estimation alorithem using adaptive search technique［J］. Journay of Beijing University of Aeronautics and Astronautics,2001,27(4):373-376.
[5] HART M R, CONANT R A, LAU K Y, MULLER R S. Stroboscopic interferometer system for dynamic MEMS characterization［J］. J Microelectromech Syst, 2000,9(4):409-418.
[6] REMBE Christian, MULLER Richard S. Measurement system for full three-dimensional motion characterization of MEMS［J］. J Microelectmmech Syst, 2002,11(5):479-488.
[7] 王明辉,彭立中.一种新的快速块匹配运动估计算法［J］.北京大学学报(自然科学版),2001,37(3):315-322.WANG Minghui, PENG Lizhong. A new fast search algorithm for block motion estimation［J］. Acta Scientiarum Naturalium Universitatis Pekinensis,2001,37(3):315-322.
[1] WANG Yan, GAO Qing, WANG Guo-hua, ZHANG Tian-shi, YUAN Meng. Simulation of mixed inner air-flow integrated thermal management with temperature uniformity of Li-ion battery [J]. Journal of Jilin University(Engineering and Technology Edition), 2018, 48(5): 1339-1348.
[2] WANG Tao, SAN Xiao-gang, GAO Shi-jie, WANG Hui-xian, WANG Jing, NI Ying-xue. Dynamic characteristics of vertical shaft system of photoelectric turntable [J]. 吉林大学学报(工学版), 2018, 48(4): 1099-1105.
[3] LI Jing, DING Ming-hui, LI Li-gang, CHEN Li-jun. Dynamic characteristics analysis and optimization of air spring based on the piston shape [J]. 吉林大学学报(工学版), 2018, 48(2): 355-363.
[4] WEI Zhi-gang, SHI Cheng-lin, LIU Han-bing, ZHANG Yun-long. Dynamic characteristics of steel-concrete composite simply supported beam under vehicles [J]. 吉林大学学报(工学版), 2017, 47(6): 1744-1752.
[5] LI Juan, MENG Ke-xin, LI Yue, LIU Hui-li. Seismic signal noise suppression based on similarity matched Wiener filtering [J]. 吉林大学学报(工学版), 2017, 47(6): 1964-1968.
[6] YANG Yue-dong, CHEN Ji-qing, LAN Feng-chong, ZHOU Yun-jiao. BIW dynamic characteristics based on spot-welding parameter identification [J]. 吉林大学学报(工学版), 2017, 47(5): 1379-1386.
[7] LI Xian-sheng, MENG Xiang-yu, ZHENG Xue-lian, CHENG Zhu-qing, REN Yuan-yuan. Dynamic characteristics of liquid sloshing in partially-filled tank [J]. 吉林大学学报(工学版), 2017, 47(3): 737-743.
[8] LIU Xiao-wei, LI Hai, WENG Rui, ZHANG Hai-feng, ZHAO Jun. Application of electrostatic torque to improve dynamic characteristics of novel rotational gyroscope [J]. 吉林大学学报(工学版), 2017, 47(3): 850-854.
[9] HE Guang, ZHANG Ming, YUAN Shuang-shi. Temperature-related dynamic characteristics of MEMS setback arming device [J]. 吉林大学学报(工学版), 2017, 47(1): 145-150.
[10] LIU Xin-hui, LI Qian-wen, CHEN Jin-shi, ZHANG Peng, NIU Ping-jie. Mathematical modeling and simulation of load-sensing priority valve [J]. 吉林大学学报(工学版), 2015, 45(6): 1817-1824.
[11] LIU Han-bing, SHI Cheng-lin, TAN Guo-jin, WANG Hua, HUANG Bin. Calculation method of the dynamic characteristics of continuous beam bridge with variable cross-section based on staging concept [J]. 吉林大学学报(工学版), 2015, 45(6): 1779-1783.
[12] TIAN Wei-jun, WANG Ji-yue1, LI Ming1, CHEN Si-yuan, LIU Fang-yuan, CONG Qian. Bionic design of the small blade of horizontal axis wind turbines [J]. 吉林大学学报(工学版), 2015, 45(5): 1495-1501.
[13] WANG Jing-yu, WANG Ze-wei, GU Qing-tong, HU Xing-jun, WANG Bao-yu. Numerical simulation of transient aerodynamic characteristics of turning vehicle [J]. 吉林大学学报(工学版), 2015, 45(1): 44-48.
[14] LIU Shun-an, HE Xing-zhu, CHEN Yan-li,YANG Lu-hong,LI Wan-lin. Aerodynamic characteristics of a ducted tail rotor with asymmetric layout [J]. 吉林大学学报(工学版), 2014, 44(5): 1353-1359.
[15] SHI Wen-ku,MAO Yang,JIANG Xue,CHEN Zhi-yong,MA Li-hong,PAN Bin. Parameter identification and dynamic characteristicsof semi-active hydraulic mount [J]. 吉林大学学报(工学版), 2014, 44(3): 605-611.
Viewed
Full text


Abstract

Cited
  Shared   
  Discussed   
No Suggested Reading articles found!
Copyright © Journal of Jilin University(Engineering and Technology Edition), All Rights Reserved.
Tel: +86-431-85095297　Fax: +86-431-85094074　E-mail: xbgxb@jlu.edu.cn
Powered by Beijing Magtech Co. Ltd