吉林大学学报(工学版) ›› 2013, Vol. 43 ›› Issue (04): 1011-1016.doi: 10.7964/jdxbgxb201304027

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Measuring system for diffraction efficiency of transmission grating in soft X-ray

LI Xu1,2, HE Fei1, CHEN Bo1   

  1. 1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033,China;
    2. Graduate University of Chinese Academy of Sciences, Beijing 100039,China
  • Received:2011-07-23 Online:2013-07-01 Published:2013-07-01

Abstract:

In order to get the absolute diffraction efficiency of transmission gratings, a soft X-ray monochromatic system is built up. The system is composed of a concave reflective grating monochromator and a laser plasma source. Three spectral lines of 30.38 nm, 53.70 nm and 58.43 nm from Helium hollow cathode source are used to calibrate the wavelength of the transmission grating measuring system. A black illumination Charge-Couple Device (CCD) is used as reception element to experimentally calibrate the diffraction efficiency of a golden self-supporting transmission grating at several energy points between 85 and 900 eV. The calibration results for the first-order relative efficiency and zero-order absolute efficiency are obtained. The diffraction efficiency of this grating in soft X-ray band is simulated using quasi trapezoidal grating line model. The simulated first-order relative diffraction efficiency is basically consistent with experimental calibration. Finally, the measured zero-order absolute efficiency and simulated first-order relative efficiency are used to fit the curve of the first-order absolute efficiency of the grating.

Key words: optoelectronics and laser, soft X-ray, transmission grating, diffraction efficiency, experimental calibration, grating model

CLC Number: 

  • TH744

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