This paper systematically reviews the various research results of in-depth learning applied in the field of industrial fault diagnosis, in order to fill the gaps in the evolution route, key technology direction and practical application of existing reviews. During the combing process, it can be observed that the development of deep learning in this field has gradually extended from the construction of basic network architecture to the development of hybrid architecture. The current research direction is focused on the innovative development of technology directions such as attention mechanism, transfer learning and generative adversarial networks. In the actual landing process, the industrial scene puts forward multiple requirements for the model, including the difficulty of data acquisition, the difficulty of model logic interpretation, and the need for the calculation speed to match the pace of industrial production. This paper further prospects the future directions of automated machine learning, multimodal fusion, physical information fusion, etc., which can facilitate the follow-up researchers to carry out related work and promote the integration of intelligent diagnosis technology into the independent operation and maintenance mode.