吉林大学学报(工学版) ›› 2010, Vol. 40 ›› Issue (06): 1698-1703.

• 论文 • 上一篇    下一篇

基于逼近样条方法的高斯表面轮廓滤波

张浩,袁怡宝   

  1. 哈尔滨工业大学 电气工程与自动化学院,哈尔滨 150001
  • 收稿日期:2008-11-21 出版日期:2010-11-01 发布日期:2010-11-01
  • 通讯作者: 张浩(1979-),男,博士研究生.研究方向:表面计量学,纳米计量学及其应用.E-mail:zhanghaowo79@163.com E-mail:zhanghaowo79@163.com
  • 作者简介:张浩(1979-),男,博士研究生.研究方向:表面计量学|纳米计量学及其应用.E-mail:zhanghaowo79@163.com
  • 基金资助:

    国家教育部归国留学人员基金项目(AEBQ24403704);国家劳动人事部归国留学人员基金项目

Gaussian profile filter based on approximating spline

ZHANG Hao,YUAN Yi-bao   

  1. School of Electrical Engineering and Automation,Harbin Institute of Technology,Harbin 150001,China
  • Received:2008-11-21 Online:2010-11-01 Published:2010-11-01

摘要:

为了克服传统高斯滤波器的卷积处理方法在提取表面中线时所产生的边缘效应,提出了一种采用变分方法建立的样条轮廓滤波器来实现高斯滤波。这种方法可称为高斯滤波器的样条实现法,兼有高斯滤波的幅度传输特性、零相移的特点和样条的特点。它的高斯滤波幅度特性符合国际标准的要求,它的样条特性又可以避免两边的边缘效应。文中研究的高斯滤波的样条处理方法,幅度特性偏差为-1.5%~+3.75%,远低于国际标准ISO11562推荐的近似处理方法的偏差(-5.0%~+5.0%)。此外这种高斯滤波的处理方法,处理效率很高,在当今通用的计算机上对11 200采样点的数据进行处理,只需要100 ms。

关键词: 计量学, 轮廓滤波器, 高斯滤波器, 样条滤波器

Abstract:

To overcome the end effect generated by the convolution method of traditional Gaussian filter in obtaining surface midline, a new spline filter is constructed by variance difference to realize Gaussian filter. This algorithm, called spline realization of Gaussian filter, preserves both Gaussian filter and spline properties. This means that this filter not only accords with the transmission characteristics of ISO, but also restrains the end distortion on data sequence. The amplitude deviation between this algorithm and Gaussian filter falls the interval (-1.5%, +3.75%), which is smaller than the interval (-5.0%, +5.0%) of the recommended algorithm by ISO11562. In addition, using this kind of Gaussian algorithm, the computation of 11200 measured points takes only 100ms on current computer, which demonstrates the efficiency of the proposed algorithm.

Key words: metrology, profile filter, Gaussian filter, spline filter

中图分类号: 

  • TN713
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