关键词: 集成光波导, 相控阵列, 光栅衍射理论, 光束传输法, 光学自准直法, 阵列中心偏检测

Abstract:

In the imaging process of optical waveguide， the center of the array is prone to shift， and the detection accuracy of the center shift of the phased array is low. For this reason， a method to detect the center deviation of integrated optical waveguide phased array is proposed. The optical wave field of integrated optical waveguide is modeled by the beam propagation method， and the scanning characteristics of integrated optical waveguide are analyzed according to the grating diffraction theory. When the center of the phased array is in the deviation state， the phased array planes are not parallel in the integrated optical waveguide. On the basis of the optical autocollimation method and the scanning characteristics of the integrated optical waveguide， the parallelism of the phased array in the integrated optical waveguide is calculated to obtain the parallelism of the phased array plane in the x and y directions， and the deviation degree of the integrated optical waveguide phased array center is detected based on this. The experimental results show that the detection errors of the proposed method in the x and y directions are 0.001 and 0.002， and the detection results are consistent with the actual results， which proves that the proposed method has high detection accuracy.

Key words: integrated optical waveguide, phased array, grating diffraction theory, beam propagation method, optical autocollimation method, array center deviation detection