扫描探针显微镜在超精密加工中的应用

吉林大学学报(工学版) ›› 2003, Vol. ›› Issue (4): 126-130.

• 论文 • 上一篇

扫描探针显微镜在超精密加工中的应用

高论¹, 王丹², 王立江¹

1. 吉林大学, 机械科学与工程学院, 吉林, 长春, 130025;
2. 吉林大学, 生物与农业工程学院, 吉林, 长春, 130025

收稿日期:2002-11-25
基金资助:
国家自然科学基金资助项目(59975043).

Application of SPM in ultraprecision machining

GAO Lun¹, WANG Dan², WANG Li-jiang¹

1. College of Mechanical Science and Engineering, Jilin University, Changchun 130025, China;
2. College of Biology and Agriculture Engineering, Jilin University, Changchun 130025, China

Received:2002-11-25

摘要/Abstract

摘要： 对扫描探针显微镜(SPM)的基本原理、成像模式及其在超精密加工中的新应用进行了评述。介绍了SPM在微细加工和光刻新技术中的应用。指出纳米级加工机理的研究将依赖于SPM的复合化和多功能化。只有实现了加工与检测的一体化才能正确评价加工方法及工艺参数的优化选择,从而推进超精密加工技术的发展。

关键词: SPM, STM, AFM, 超精密加工, 纳米加工

Abstract: A review and description are made of bascic principles,imaging pattern of a scanning probe microscope and its application in ultraprecision machining. This paper gives an overview of SPM application in microfabrication and photofabrication,and indicates that the research of nanometer sized machining mechanism will rely on SPM composition and multi functions. None but the integration of processing and measurement is realized,machining method and optional selection of technological parameter are right evaluated,advancing the development in ultraprecision machining.

Key words: SPM, STM, AFM, ultraprecision machining, nanofabrication

中图分类号:

TH742

高论, 王丹, 王立江. 扫描探针显微镜在超精密加工中的应用[J]. 吉林大学学报(工学版), 2003, (4): 126-130.

GAO Lun, WANG Dan, WANG Li-jiang. Application of SPM in ultraprecision machining[J]. 吉林大学学报(工学版), 2003, (4): 126-130.

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