关键词: 机械制造工艺与设备, 压电叠堆, 微驱动, 步进, 电磁铁箝位, 柔性铰链

Abstract: A largetravel highresolution step rotary microactuator with a discrete layout was developed based on the step moving principle. A flexible electromagnetic hinge was used to realize the anchoring/lossening of the rotor and a piezoelectric pile as the driver and a flexible hinge was used to transform the linear motion of the piezoelectric pile into the rotary motion, thus a precise largetravel step rotary actuation was realized. Experiments show that the developed actuator is characterized by fast anchoring, high resolution, and large travel, being applicable in the sophisticated micromanipulations.

Key words: mechanical manufacturing engineering and equipment, piezoelectric pile, microdriving, step moving, electromagnetic anchoring/loosening, flexible hinge