关键词: 仪器仪表技术, 压电叠堆, 柔性铰链, 有限元, 压电叠堆泵

Abstract: Based on piezoelectric precision drive technology, a hydropump using a piezoelectric stack as actuator and a flexible hinge as magnifieation mechanism was prototyped and tested. The hysteresis behavior of Tokin AE0505 D16 type piezoelectric stack was analyzed and its stiffness characteristic and dynamic response charateristic were studied theoretically. A flexible hinge mechanism to magnify the displacement was prototyped and the factor affecting its torsional deformation and torsional stiffness were analyzed, and its structual parameters were proposed. The dynamic response, the amplitudefrequency characteristic, the hysteresis behavior, and the force output versus displacement of the flexible hinge were tested under different power supply excitations, and the factor affecting the displacement magnification ratio and the output charateristics of the magnification mechanism were found. The flexible himge was also analyzed by a FEM simulation software and its feasibility and security were validated. The developed piezoelectric stack pump was tested under different input signal voltages and frequencies and the effects of the input on the output flow rate and pressure of the pump were obtained.

Key words: technology of instrument and meter, piezoelectric stack, flexure hinge, finite element, piezoelectric stack pump