吉林大学学报(工学版) ›› 2017, Vol. 47 ›› Issue (1): 308-315.doi: 10.13229/j.cnki.jdxbgxb201701045

• 论文 • 上一篇    下一篇

用于TOF-SIMS的锆石样品图像自动聚焦算法

王培智1, 田地1, 龙涛2, 李抵非3, 邱春玲1, 刘敦一2   

  1. 1.吉林大学 仪器科学与电气工程学院,长春 130061;
    2.中国地质科学院地质研究所 北京离子探针中心,北京 102206;
    3.中国计量科学研究院,北京 100029
  • 收稿日期:2016-01-28 出版日期:2017-01-20 发布日期:2017-01-20
  • 通讯作者: 龙涛(1984-),男,副研究员.研究方向:质谱仪器研制与应用.E-mail:longtao@bjshrimp.cn
  • 作者简介:王培智(1987-),男,博士研究生.研究方向:二次离子质谱技术.E-mail:wangpeizhi840923@163.com
  • 基金资助:
    国家重大科学仪器设备开发专项项目(2011YQ05006902).

Automatic focusing algorithm for TOF-SIMS zircon sample image

WANG Pei-zhi1, TIAN Di1, LONG Tao2, LI Di-fei3, QIU Chun-ling1, LIU Dun-yi2   

  1. 1.College of Instrumentation and Electrical Engineering, Jilin University,Changchun 130061, China;
    2.Beijing SHRIMP Center, Institute of Geology,Chinese Academy of Geological Sciences, Beijing 102206,China;
    3.National Institute of Metrology, Beijing 100029,China
  • Received:2016-01-28 Online:2017-01-20 Published:2017-01-20

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摘要： 为满足现代二次离子质谱仪(SIMS)锆石样品图像自动聚焦系统对聚焦准确度的要求,提出了一种具有自动消除噪声功能的锆石样品图像自动聚焦算法,并将其应用于飞行时间二次离子质谱仪(TOF-SIMS)。该算法包括锆石图像识别分割法、分段式聚焦算法和调焦控制策略。在聚焦远峰区,采用Roberts算子的聚焦评价函数及差分累加的调焦控制策略进行粗调;在聚焦近峰区,捕捉图像中的锆石目标进行识别分割,采用局部坐标算子的聚焦评价函数与爬山法相结合的调焦控制策略进行聚焦细调。实验结果表明:该算法聚焦准确率达99%,可有效抑制噪声干扰,实现了对锆石样品图像的自动、准确聚焦。

关键词: 自动控制技术, 分段式聚焦算法, 图像识别, 图像分割, 飞行时间二次离子质谱仪

Abstract: In order to satisfy the requirement of focusing accuracy of modern Secondary Ion Mass Spectrometer (SIMS)'s zircon sample image auto focusing system, an algorithm that automatically removes noise is proposed and applied to the Time-of-Flight (TOF)-SIMS. The proposed algorithm includes zircon image recognition and segmentation, a secondary-type focusing algorithm, and a focusing control strategy. A Roberts function and a differential accumulation focusing control strategy are used for coarse tuning in area far from the peak. In the near-peak region, the zircon image is captured and segmented from the background. A local coordinate function and hill climbing method are then used for fine tuning. A series of experiments show that the proposed algorithm has an accuracy rate of 99% and can effectively restrain noise interference, enabling the automatic focusing of zircon sample images.

Key words: automatic control technology, sectional type focusing algorithm, image recognition, image segmentation, time of flight-secondary ion mass spectrometer(TOF-SIMS)

中图分类号: 

  • TH84
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