吉林大学学报(工学版) ›› 2015, Vol. 45 ›› Issue (1): 161-166.doi: 10.13229/j.cnki.jdxbgxb201501024

• Orignal Article • Previous Articles     Next Articles

Operating characteristics of duoplasmatron ion source

QIU Chun-ling1,ZENG Xiao-hui1,LONG Tao2,BAO Ze-min1,WANG Pei-zhi1   

  1. 1.College of Instrumentation and Electrical Engineering, Jilin University, Changchun 130022, China;
    2.Institute of Geology, Chinese Academy of Geological Sciences, Beijing 100037, China
  • Received:2013-11-15 Online:2015-02-01 Published:2015-02-01

Abstract: The stability of brightness of the O- beam generated from the douplasmatron ion source is influenced by the gas pressure, the magnetic field strength and the arc current. An ion optical system for measuring the brightness of a duoplasmatron of the SRHIMP II was presented. The brightness of the O- beams as a function of the gas pressure, the magnetic field strength and the arc current was experimentally studied. The results show that longtime, stable operation of the ion source can be realized at the pressure range from 110 mTorr to 170 mTorr and an arc current above 50 mA. The maximum brightness measurements give 52.4 A/(cm2·sr) for O- with 0.25 T magnetic field strength, a low pressure of 140mTorr ere and an arc current of 200 mA. Controlling these parameters reasonably can increase the brightness of O-, improve the lateral resolution and the sensitivity of the secondary ion mass spectrometry.

Key words: technology of instrument and meter, secondary ion mass spectrometry, duoplasmatron ion source, ion optics, ionbeam brightness

CLC Number: 

  • TB773
[1] 徐福兴,王亮,罗娟,等. 一种新型二次离子质谱的一次离子源及其离子光学系统[J]. 分析化学,2011,39(10):1501-1505.
Xu Fu-xing, Wang Liang, Luo Chan, et al. A novel primary ion source and ion optics of secondary ion mass spectrometry[J]. Chinese J Anal Chem, 2011, 39(10): 1501-1505.
[2] 周强,李金英,梁汉东,等. 二次离子质谱(SIMS)分析技术及应用进展[J]. 质谱学报,2004,25(2):113-120.
Zhou Qiang, Li Jin-ying, Liang Han-dong, et al. Recent developments on secondary ion mass spectrometry[J]. Chinese Journal of Chinese Mass Spectrometry Society, 2004, 25(2): 113-120.
[3] Alfred Benninghoven. Chemical analysis of inorganic and organic surfaces and thin films by static time-of-flight secondary ion mass spectrometry (TOF-SIMS)[J]. Angewandte Chemie International Edition in English,1994, 33(10): 1023-1043.
[4] 査良镇,桂东,朱怡峥. 二次离子质谱学的新进展[J].真空科学与技术学报,2001,21(2):129-136.
Cha Liang-zhen,Gui Dong,Zhu Yi-zheng.Latest progress in secondary ion mass spectroscopy[J].Vaccum Science and Technology,2001,21(2):129-136.
[5] Pillatsch L, Wirtz T, Migeon H N, et al. Use of a duoplasmatron ion source for negative ion generation[J]. Nuclear Instruments and Methods in Physics Research, 2011, 269(9): 1606-1609.
[6] 赵墨田,曹永明,陈刚,等. 无机质谱概论[M].北京:化学工业出版社,2006:64-65.
[7] Lejeune C. Theoretical and experimental study of the duoplasmatron ion source[J]. Nucl Instrum Methods, 1974, 116(3):417-428.
[8] Smith N S, Tesch P P, Martin N P, et al. A high brightness source for nano-probe secondary ion mass spectrometry[J]. Applied Surface Science, 2008, 255(4): 1606-1609.
[9] Coathe C D, Long J V P. A high-brightness duoplasmatron ion source for microprobe secondary-ion mass spectrometry[J]. Rev Sci Instrum, 1995, 66(2): 1018-1023.
[10] Yasuyuki Ishii, Akira Isoya, Takuji Kojima, et al. Estimation of keV submicro ion beam width using a knife-edge method[J]. Nuclear Instruments and Methods in Physics Rearch, 2003, 211(3):415-424.
[11] 徐均琪,杭凌侠,弥谦,等. 宽束冷阴极离子源的工作特性研究[J]. 真空科学与技术学报, 2008, 28(3): 266-270.
Xu Jun-qi, Hang Ling-xia, Mi Qian, et al. Operating characteristics of newly modified broad beam ion source[J]. Vaccum Science and Technology, 2008, 28(3): 266-270.
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