吉林大学学报(工学版) ›› 2018, Vol. 48 ›› Issue (3): 796-802.doi: 10.13229/j.cnki.jdxbgxb20171132
任庆磊, 魏昕, 谢小柱, 胡伟
REN Qing-lei, WEI Xin, XIE Xiao-zhu, HU Wei
摘要： 建立了杯型金刚石砂轮稳定延性域磨削过程中砂轮微单元与硅片的微接触力学模型,采用力分解法研究了其自旋转磨削微观作用机理。法向分解分别运用接触力学中的赫兹理论和“空腔模型”理论分析得出硅片上对应弹性和塑性阶段的载荷和应力分布情况,以及砂轮微单元上相应的应力分布情况;切向分解运用微观摩擦学理论分析得出滑动摩擦力以及法、切向合成微接触总应力的情况。分析与试验对比结果证明了本文方法有效,可为硅片自旋转磨削机理研究提供理论支撑。
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