吉林大学学报(工学版) ›› 2004, Vol. ›› Issue (3): 388-391.

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Uniformity simulation of abrasiveless cryogenic polishing

GAO Chunfu, LIU Xiangyang, WANG Lijiang, LIU Weina, WANG Xiaofei   

  1. College of Mechanical Science and Engineering, Jilin University, Changchun 130022, China
  • Received:2003-07-20 Online:2004-07-01

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Abstract: A process of cryogenic polishing without abrasive to get the atom-level super-smooth surface was introduced.A model for the machining area was proposed,the horizontal relative movement between the ice plate and the parts plate was analyzed. With the Preston equation,the polishing uniformity was analyzed and simulated.The results show that the polishing uniformity is better when the rotate speed of parts plate is near that of the ice plate,and the eccentricity between the ice plate and the parts plate is larger.

Key words: mechanical design, abrasiveless polishing, cryogenic polishing, uniformity, simulation

CLC Number: 

  • TG506.9
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