吉林大学学报(工学版) ›› 2003, Vol. ›› Issue (2): 20-24.

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Precision linear actuator of piezoelectric based on wriggle principle

LI Xin-xin, LU Quan-guo, YANG Zhi-gang, CHENG Guang-ming, ZENG Ping   

  1. College of Mechanical Science and Engineering, Jilin University, Changchun 130025, China
  • Received:2002-12-14

Abstract: Based on the wriggle principle and error compensation method,a precision linear actuator and its dynamic model were presented.Under the closing loop control of PC,the actuator can provide stable stepping movement in the stroke of 1 mm,the positioning accuracy of ±0.01μm and the force output of 20 N.

Key words: wriggle, error compensation, piezoelectric, closing loop control

CLC Number: 

  • TH603.8
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