吉林大学学报(工学版) ›› 2017, Vol. 47 ›› Issue (1): 308-315.doi: 10.13229/j.cnki.jdxbgxb201701045

• Orginal Article • Previous Articles     Next Articles

Automatic focusing algorithm for TOF-SIMS zircon sample image

WANG Pei-zhi1, TIAN Di1, LONG Tao2, LI Di-fei3, QIU Chun-ling1, LIU Dun-yi2   

  1. 1.College of Instrumentation and Electrical Engineering, Jilin University,Changchun 130061, China;
    2.Beijing SHRIMP Center, Institute of Geology,Chinese Academy of Geological Sciences, Beijing 102206,China;
    3.National Institute of Metrology, Beijing 100029,China
  • Received:2016-01-28 Online:2017-01-20 Published:2017-01-20

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Abstract: In order to satisfy the requirement of focusing accuracy of modern Secondary Ion Mass Spectrometer (SIMS)'s zircon sample image auto focusing system, an algorithm that automatically removes noise is proposed and applied to the Time-of-Flight (TOF)-SIMS. The proposed algorithm includes zircon image recognition and segmentation, a secondary-type focusing algorithm, and a focusing control strategy. A Roberts function and a differential accumulation focusing control strategy are used for coarse tuning in area far from the peak. In the near-peak region, the zircon image is captured and segmented from the background. A local coordinate function and hill climbing method are then used for fine tuning. A series of experiments show that the proposed algorithm has an accuracy rate of 99% and can effectively restrain noise interference, enabling the automatic focusing of zircon sample images.

Key words: automatic control technology, sectional type focusing algorithm, image recognition, image segmentation, time of flight-secondary ion mass spectrometer(TOF-SIMS)

CLC Number: 

  • TH84
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